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Hydrogen passivation of silicon/silicon oxide interface by atomic layer deposited hafnium oxide and impact of silicon oxide underlayer
Evan Oudot, Mickael Gros-Jean, Kristell Courouble, François Bertin, Romain Duru, Névine Rochat, Christophe Vallée, E Oudot, M. Gros-Jean, K Courouble, F. Bertin, R Duru, N Rochat, C Vallee
2018
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