The electron beam for scanning transmission electron microscopy (STEM) provides rich information about the atomic structure and chemical composition of materials from micron to atomic scale. However, the electron probe can also damage the materials of interest, as the high-energy electrons are often focused on very small sample regions [ 1]. These effects limit the quality of information which can be extracted from experiments on beam-sensitive materials, such as Li-ion battery materials and metal halide perovskites used in solar cell devices [ 2]. However, with the increasing interest in these materials to address environmental and societal concerns, a detailed understanding of their microstructure and chemical composition at high spatial resolution is needed to improve their performance and stability.
For these materials, the correlation between processing and nanoscale structure-property relationships has been difficult to firmly establish. As shown in Fig. 1a- 1c, phase change or amorphisation in beam-sensitive materials can be easily caused by a focused electron probe. Fortunately, this problem can be solved through combined scanning electron nano-diffraction (SEND) [3] and energy dispersive X-ray spectroscopy (EDX) with low electron dose conditions, providing nanoscale crystallographic and chemical information from the specimen. However, the signal-to-noise (SNR) of the EDX data is very poor - with just a few counts in any individual scan prohibiting comprehensive materials characterisation (Fig. 1d).
To address this, we perform automated SEND-EDX data acquisition under low dose conditions utilising our automated data analysis workflow. By communicating with two different modalities, i.e., Aztec ®; Oxford Instruments and MerlinEM; Quantum Detectors, and using our Python-based software, many SEND-EDX data pairs were simultaneously acquired from a metal halide perovskite.
Fig. 1
(a) Virtual annular dark-field image of a metal halide perovskite; (b, c) sum of diffraction patterns for the green square area of 2×2 pixels in (a) for the 1 st and the 7 th frames, respectively; after multiple scans with the dwell time of 1 millisecond for the same area, some diffraction peaks, marked with white circles, disappeared or were weakened due to the beam damage; (d) sum of energy dispersive X-ray spectra for a spectrum image of 128×127 pixels