Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
10711023
Publication date Created: 2006
Publication date
(Print):
2006
Volume: 24
Issue: 3
Page: 1595
Article
DOI: 10.1116/1.2200378
SO-VID: f57cc14e-6473-4fba-9277-9d5aaec236f8
Copyright © ©
2006