Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer

Puente, D; Arana, S; Gracia, J.; Ayerdi, I

doi:10.1109/JSEN.2006.874030

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Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer

Author(s): D. Puente , S. Arana , J. Gracia , I. Ayerdi

Publication date (Print): June 2006

Journal: IEEE Sensors Journal

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

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Title: IEEE Sensors Journal

Abbreviated Title: IEEE Sensors J.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 1530-437X

Publication date Created: June 2006

Publication date (Print): June 2006

Volume: 6

Issue: 3

Pages: 548-556

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DOI: 10.1109/JSEN.2006.874030

SO-VID: d67dbc1a-16d1-4f48-9803-a262e6b061e2

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Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer

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