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      High Temperature microhardness of hard coatings produced by physical and chemical vapor deposition

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      Thin Solid Films
      Elsevier BV

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          Titanium aluminum nitride films: A new alternative to TiN coatings

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            Structure and properties of TiN coatings

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              On structure and properties of sputtered Ti and Al based hard compound films

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                Author and article information

                Journal
                Thin Solid Films
                Thin Solid Films
                Elsevier BV
                00406090
                October 1987
                October 1987
                : 153
                : 1-3
                : 19-36
                Article
                10.1016/0040-6090(87)90166-0
                75d07384-3f7e-4266-a387-8eb7933a54b7
                © 1987

                http://www.elsevier.com/tdm/userlicense/1.0/

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