A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique

Chang, Ming-Wei; Liu, Mao-Chen; Dai, Ching-Liang; Chen, Fu-Song; Wu, Chyan-Chyi

doi:10.1016/j.snb.2006.10.055

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A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique

Author(s): Ching-Liang Dai , Mao-Chen Liu , Fu-Song Chen , Chyan-Chyi Wu , Ming-Wei Chang

Publication date Created: May 2007

Publication date (Print): May 2007

Journal: Sensors and Actuators B: Chemical

Publisher: Elsevier BV

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Title: Sensors and Actuators B: Chemical

Abbreviated Title: Sensors and Actuators B: Chemical

Publisher: Elsevier BV

ISSN (Print): 09254005

Publication date Created: May 2007

Publication date (Print): May 2007

Volume: 123

Issue: 2

Pages: 896-901

Article

DOI: 10.1016/j.snb.2006.10.055

SO-VID: 412254fc-63f1-4886-93f3-bef86be36c7f

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http://www.elsevier.com/tdm/userlicense/1.0/

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A nanowire WO3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique

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