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An Introduction to Lithography
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Author(s):
L. F. THOMPSON
Publication date
(Online):
July 23 2009
Publisher:
AMERICAN CHEMICAL SOCIETY
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An Introduction to SAXS
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Book Chapter
Publication date (Print):
May 03 1983
Publication date (Online):
July 23 2009
Pages
: 1-13
DOI:
10.1021/bk-1983-0219.ch001
SO-VID:
ee38f9ee-2063-408c-8b21-35c33d1ba966
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Book chapters
pp. 1
An Introduction to Lithography
pp. 15
The Lithographic Process: The Physics
pp. 87
Organic Resist Materials — Theory and Chemistry
pp. 161
Resist Processing
pp. 215
Plasma Etching
pp. 287
Multi-Layer Resist Systems
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