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      • Record: found
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      Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

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      Publisher: Springer US

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          {1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

          Nicolas Ledermann, Paul Muralt, Jacek Baborowski … (2003)
          Article 0 comments Cited 67 times – based on 0 reviews     Review now
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            Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

            Marc-Alexandre Dubois, Paul Muralt (1999)
            Article 0 comments Cited 54 times – based on 0 reviews     Review now
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              The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films

              P.J. Moses, S. Trolier-McKinstry, J.F. Shepard (1998)
              Article 0 comments Cited 48 times – based on 0 reviews     Review now
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                Book Chapter
                Publication date (Print): 2005
                Pages: 37-48
                DOI: 10.1007/0-387-23319-9_3
                SO-VID: 91e49dfb-8d58-44fa-afd9-b933b72f82a8
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